support of public and industrial
research using ion beam technology
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High Resolution IBA

Ion Beam Analysis

Technique
3D magnetic spectrograph
3D magnetic spectrograph

Quantitative ion beam analysis of ultra-thin layers with sub-nanometer depth resolution

  • Ultrathin films and layers exhibit novel structural, physical und chemical properties
  • Layer properties are strongly influenced by surface and interface
Magnetic spectrometer of Browne-Buechnertype for RBS and ERDA
Magnetic spectrometer of Browne-Buechnertype for RBS and ERDA

Typical applications

  • Ultra-shallow implantation profiles
  • Diffusion barriers for IC technology
  • Interface mixing in IBAD processing
  • Heteroepitaxy / layer growth / phase formation
  • X-ray mirrors
  • Novel magnetic multilayer structures
  • Ultra-thin multilayers / quantum wells
RBS Scheme
HR-ERD and HR-RBS at FZD
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