Katholieke Universiteit Leuven
The KUL, founded in 1425, has ~ 32,500 students in 14 faculties of which 3 are in exact sciences and 3 in biomedical sciences. With 4.600 researchers (FTE) it delivers about 450 PhD’s per year. The institute for Nuclear and Radiation Physics specialises in (i) nuclear physics (nuclear moments, nuclear orientation and nuclear spectroscopy) and (ii) nuclear solid state physics the latter group has an ion beam facility (consisting of 3 accelerators). Through collaboration with IMEC, KUL has access to equipment for low-energy ERDA and ToF RBS and has many joint projects with their ion beam group.
Role in SPIRIT and tasks
The group at KUL will offer TNA users (channelled) implantation and irradiation with a wide variety of ions, in an energy range between 40 and 600 keV on 2” wafers at a temperature between -196°C and 800°C. Various radioactive ion beams can be delivered. High-resolution ion beam analysis (ERDA and RBS) will be available. Channelling spectroscopy for crystallinity studies (defects, elastic strain, lattice location…) will be provided.
The group at KUL has a long time experience in ion beam techniques, both for stable and radioactive ions, and for implantation (including channelled implantation and soft landing), irradiation, analysis (RBS, channelling, PIXE, ERDA) and SIMS. Recently, low-energy ERDA for high-resolution depth profiling has been introduced. Of particular interest is the availability of accelerators coupled to UHV-equipment for deposition and surface analysis.