support of public and industrial
research using ion beam technology
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High Energy Ion Irradiation

Technique
High-Energy Ion Irradiation
High-Energy Ion Irradiation

Ion Beam Applications for Semiconductor Electronics

High-Energy Ion Irradiation
(2 – 30 MeV; H, He, B, P, Au, Pt etc.)

  • Silicon Power Devices (diodes, MOSFET’s, IGBT’s, thyristors): Increase of switching speed, Lowering of thermal power dissipation
  • Improvement of the emission characteristics of Laser Diodes
  • Silicon Detectors for Ionizing Radiation (Electron Detectors, Avalanche-Fotodiodes): Detectors with optimized field
    distribution Improvement of detector linearity, Precise adjustment of Avalanche effect
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