support of public and industrial
research using ion beam technology
RBS
Rutherford backscattering spectrometry
Quantitative elemental analysis of thin films and surface – near layers
- High detection sensitivity for heavy elements in/on a light matrix
- Blind for light elements in a heavy matrix
- Quantitative with an accuracy of < 1% due to Coulomb scattering (Rutherford
scattering cross section)
- Good depth resolution of < 5 nm using standard silicon detectors
- Employing channeling for damage measurements in single crystals
User access at the following partners
