support of public and industrial
research using ion beam technology
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Microprobe

Technique
Microprobe of FZD
Microprobe at the HZDR

Method

A high-energy ion beam focused to few micrometers is scanned across a sample and initiates different processes of interaction with the atoms of the target material. The following analysing techniques can be used:

Microprobe of RBI
Microprobe of RBI

Typical Parameter

  • Lens system: electromagnetic quadrupole triplet
  • Refractive power: M x E / q2 = 45 MeV amu
  • Incidence particles: nearly all ions
  • Beam current: > 100 pA
  • Beam spot: > 2 μm; > 10 μm for channeling experiments
  • depth resolution: about 8 nm (Si), min.1 nm (grazing incidence)
  • Scanning area: up to 2 x 2 mm2
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